A silicon wafer generally refers to a thin slice cut from single-crystal silicon. Silicon wafers are available in diameters such as 2 inches, 3 inches, 4 inches, 6 inches and 8 inches, and are mainly used to manufacture integrated circuits. The wafer is the raw material, while the chip is the finished product. Silicon wafers are important materials for integrated circuit manufacturing; through lithography, ion implantation and other processes, they can be made into various semiconductor devices.

Quartz wafers have excellent optical performance, along with thermal shock resistance, low thermal expansion coefficient, high-temperature resistance, good chemical stability and excellent electrical insulation. Therefore, they are widely used in semiconductor manufacturing, electric light sources, semiconductor communication devices, lasers, optical instruments, laboratory instruments, electrical equipment, medical devices, high-temperature and corrosion-resistant chemical instruments, chemical, electronics, metallurgy, building materials, defense, printing and dyeing, plastics, food processing and medical and health industries.

SOI (Silicon-On-Insulator) wafers place a thin silicon layer on an insulating substrate. Transistors are fabricated on this thin silicon layer known as SOI. Devices based on SOI structures can inherently reduce junction capacitance and leakage current, improve switching speed, reduce power consumption and achieve high-speed, low-power operation. As a next-generation silicon-based integrated circuit technology, SOI is widely used in most microelectronics fields and also in optoelectronics, MEMS and other areas.

Photoresist, also called a photo-sensitive resist, is a resist thin-film material whose solubility changes under exposure or radiation from ultraviolet light, electron beams, ion beams, X-rays and other sources. It can be used for deep silicon etching and is suitable for high-aspect-ratio processes, with high transparency and good verticality.