MEMS Devices | Flexible Electrodes, Probes, PMUT and Microfluidics

Flexible Electrodes

Flexible Electrode Overview

Flexible electrodes manufactured using MEMS (Micro-Electro-Mechanical Systems) processes are miniature electronic components with good flexibility and conductivity. Their manufacturing workflow involves multiple precision processing steps and combines traditional semiconductor manufacturing technologies with flexible material processing technologies.

Product Features

・Flexibility: bendable, stretchable and twistable.
・Lightweight: suitable for portable and wearable devices.
・High conductivity: multiple conductive material options for efficient electrical conduction.
・Good biocompatibility: suitable material selection enables safe and effective application.

Typical Applications

・Wearable devices
・Brain-computer interfaces
・Sensors
・Flexible electronics

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Probes

Probe Overview

This product is a high-performance probe for atomic force microscopy (AFM). As a core consumable for AFM, the probe is designed to meet high-precision research requirements. Addressing common technical bottlenecks in the current probe market, such as short service life, unstable resolution and poor consistency, Semicon Global Tech is committed to developing new probes that deliver more reliable and clearer imaging results for leading laboratories exploring the microscopic world.

Product Features

・The tip radius can reach the 10 nm level, and the micro-cantilever length and thickness are strictly calibrated to ensure high-sensitivity scanning of samples.
・In process technology, we move beyond traditional wet etching and introduce advanced dry etching technology, enabling more precise control of tip sharpness and geometry to significantly improve probe resolution and consistency.

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Two-Dimensional Materials

Two-Dimensional Materials Overview

Two-dimensional materials, formally known as two-dimensional atomic crystal materials, are materials in which electrons can move freely only in two dimensions at non-nanoscale thicknesses (1–100 nm), i.e., planar motion. These materials include graphene, boron nitride, molybdenum disulfide, tungsten disulfide, molybdenum diselenide, MXene and others. Graphene features single-atomic-layer thickness and high carrier mobility.

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PMUT

PMUT Overview

PMUT (Piezoelectric Micromachined Ultrasonic Transducer) is a miniature ultrasonic transducer manufactured using MEMS (Micro-Electro-Mechanical Systems) technology. It operates based on the piezoelectric effect: applying voltage to a piezoelectric film causes mechanical deformation to emit ultrasound; when receiving ultrasound, mechanical stress generates an electrical charge signal, enabling conversion between electrical energy and acoustic energy.

Product Features

・Small size and low power consumption
・High integration
・Strong environmental adaptability
・Excellent performance

Typical Applications

・Time-of-Flight (ToF) ranging and sensing
・Ultrasonic fingerprint recognition
・Human-machine interaction

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MEMS Switches

MEMS Switch Overview

MEMS (Micro-Electro-Mechanical Systems) switches are miniature mechanical switches manufactured using micro/nano fabrication technology. Their core is a tiny movable cantilever structure. Electrostatic or other driving forces control the mechanical movement of the cantilever, enabling signal terminals to be turned on and off. According to application fields, they are mainly divided into RF MEMS switches and MEMS relays.

Product Features

・Supports TSV/TGV wafer-level packaging
・Offers on-chip integration capability
・Can be fabricated on glass, quartz, high-resistivity silicon and other substrates

Typical Applications

・RF front ends
・Wireless communications
・Automatic test systems
・Smart grids

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Silicon Nitride Membrane Windows

Silicon Nitride Membrane Window Overview

Customized silicon nitride membrane windows are ideal carriers for synchrotron X-ray, soft X-ray, ultraviolet or extreme ultraviolet sample structure analysis and transmission imaging experiments. Semicon Global Tech can provide customized solutions according to user requirements.

Customization Types

Large-window and multi-window silicon nitride membranes
Large-window and multi-window silicon nitride membranes are mainly used as vacuum windows in synchrotron radiation experiments. Multi-window products are mainly used to distinguish different samples.

Cantilever beam heating devices
Used in transmission electron microscopy to study material electrochemical reaction and decomposition processes under high-temperature conditions.

Open electrochemical chips
Open electrochemical chips use ionic liquid electrolytes. In transmission electron microscopy, electrode samples with gold wire edges wetted by the ionic liquid can be directly observed, enabling high-resolution in-situ real-time observation.

Heating Chips
Thermal chips rely on the extremely high stability and low heat capacity of silicon nitride membranes to enable stable thermal observation. The chips use platinum as the heating electrode layer and signal feedback layer, and can withstand temperatures up to 1200°C.

Typical Uses

・TEM observation of materials, biological samples and related specimens
・High thermal stability, allowing quasi in-situ morphology studies of the same sample before and after annealing
・Non-toxic and suitable for biological sample culture and observation
・Used for EDX/EELS observation of carbon-containing samples to avoid interference

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Microfluidics

Microfluidics Overview

The main fabrication methods for microfluidic devices come from lithography in the microelectronics industry and soft lithography for surface patterning. Based on these two technologies, bonding of two materials is usually required to form complete microfluidic microchannels. Materials such as glass and silicon wafers are bonded using high temperature, high pressure or high voltage, while PDMS materials are bonded through oxygen plasma treatment.

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