Foundation of MEMS Device Manufacturing: High-Performance Thin-Film Materials and Precision Processing
MEMS devices integrate microelectronics and micromechanics and are widely used in consumer electronics, medical health, autonomous driving, optical communications and other key fields. Their performance depends directly on high-performance thin-film materials and precision processing technologies. Thin-film materials provide structural support, functional response and reliability assurance for MEMS devices. Together with precise and controllable fabrication processes, they form the foundation of MEMS manufacturing and drive devices toward miniaturization, higher sensitivity and higher reliability.
2026-03-05