Process Equipment
Etching and Process Parts
Replacement and process parts for etching, PVD, RTP, EPI, diffusion and related semiconductor equipment applications.
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Parts for Semiconductor Processing and Clean-Room Automation
Browse process-equipment replacement parts and polyurethane clean-room wheels through two dedicated product categories. Existing product pages remain available under Etching and Process Parts.
Clean-Room Automation
Clean Room Wheel
Polyurethane traveling, driven and side-guide wheels for stacker crane, OHCV, OHT, RGV and AGV systems.
View ProductsCustom Engineering
Need a wheel matched to your equipment?
Send us your drawing, target load, travel speed and clean-room requirements. Our team will review the specification and recommend a suitable construction.
