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AMAT Rersa Parts

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AMAT Rersa Parts
Product Overview
Replacement PVD parts for AMAT Rersa equipment, including hub, lid, insulator ring, liners, door slit and plasma screen.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
0200-08585HUB
0200-14989LID
0200-36034INSULATOR RING
0041-83133LINER UPPER
0020-87845LINER CATHODE
0020-87876LINER LOWER
0020-89739DOOR SLIT
0021-44786PLASMA SCREEN
Product Images
AMAT Rersa Parts
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