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AMAT Sym3 Parts

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AMAT Sym3 Parts
Product Overview
Replacement chamber and gas-delivery parts for AMAT Sym3 etching equipment, including hub, lid, nozzle, gas injector, liners and plasma screen.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
0200-17990HUB
0200-17989LID
0200-06616NOZZLE
0200-15120GAS INJECTOR
0041-90314LINER, TSGD MK2, SINGLE SLIT
0041-89596CATHODE SLEEVE, ORION FIXED
0022-24163SLIT LINER DOOR
0022-24165PLASMA SCREEN
Product Images
AMAT Sym3 Parts
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