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LAM Kiyo CX Parts

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LAM Kiyo CX Parts
Product Overview
Replacement parts for LAM Kiyo CX etching equipment, including injector, TCP window, top chamber, chamber liner, outer liner and liner door.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
716-057993-001INJECTOR
719-003481-858TCP WINDOW
715-027638-822TOP CHAMBER
715-042721-866CHAMBER LINER
714-045743-809OUTER LINER
715-045710-821LINER DOOR
Product Images
LAM Kiyo CX Parts
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