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LAM Kiyo EX Parts

Semiconductor Materials

LAM Kiyo EX Parts
Product Overview
Replacement parts for LAM Kiyo EX etching equipment, covering the chamber, window, liner, edge ring and gas-injection assemblies for this platform.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
716-057993-335INJECTOR
719-003481-861TCP WINDOW
719-003481-868WINDOW
715-027638-822TOP CHAMBER
715-059638-803MIDDLE CHAMBER
715-042721-886LINER
714-045743-809OUTER LINER
716-077262-111TOP EDGE RING
716-026652-911BOTTOM EDGE RING
715-045710-821LINER DOOR
Product Images
LAM Kiyo EX Parts
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