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Home
MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
Electroplating
Semiconductor Materials
Silicon Wafers
Glass Wafers
Quartz Wafers
PI Films
SOI Wafers
Photomasks
Photoresists
Parts
MEMS Devices
Flexible Electrodes
Probes
Two-Dimensional Materials
PMUT
MEMS Switches
Silicon Nitride Membrane Windows
Microfluidics
About Us
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LAM Kiyo FX Parts
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LAM Kiyo FX Parts
Product Overview
Replacement parts for LAM Kiyo FX etching equipment, including injector, windows, top chamber, chamber liner, liner and liner door.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)
Description
716-057993-335
INJECTOR
719-003481-861
WINDOW
715-059638-603
TOP CHAMBER
715-042721-866
CHAMBER LINER
715-042721-885
LINER
715-045710-821
LINER DOOR
Product Images
MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
Electroplating
Semiconductor Materials
Silicon Wafers
Glass Wafers
Quartz Wafers
PI Films
SOI Wafers
Photomasks
Photoresists
Parts
MEMS Devices
Flexible Electrodes
Probes
Two-Dimensional Materials
PMUT
MEMS Switches
Silicon Nitride Membrane Windows
Microfluidics
About Us
Company Profile
Our Team
News & Insights
Company News
Contact Us
Contact Information
Online Inquiry
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