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MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
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TEL RK6+/RK7 Parts
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TEL RK6+/RK7 Parts
Product Overview
Replacement exhaust plate, bottom shield ring, window, shutter and deposition shield for TEL RK6+/RK7 etching equipment.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)
Description
2L 10-501766-11
EXHAUST PLATE
2L 10-501609-12
BOTTOM SHIELD RING
2L 10-352798-21
WINDOW
2L 10-258879-11
SHUTTER
2L 10-153941-11
DEPOSITION SHIELD
Product Images
MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
Electroplating
Semiconductor Materials
Silicon Wafers
Glass Wafers
Quartz Wafers
PI Films
SOI Wafers
Photomasks
Photoresists
Parts
MEMS Devices
Flexible Electrodes
Probes
Two-Dimensional Materials
PMUT
MEMS Switches
Silicon Nitride Membrane Windows
Microfluidics
About Us
Company Profile
Our Team
News & Insights
Company News
Contact Us
Contact Information
Online Inquiry
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